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PRODUCT AND PROCESS CHANGE NOTIFICATION
Generic Copy

ISSUE DATE:20-Feb-1998
NOTIFICATION:3448
TITLE:MOS11 OPTIMIZED METALLIZATION ON UDR2 0.42UM TECHNOLOGY
EFFECTIVE DATE:21-Mar-1998


Because of an order from the United States International Trade Commission, BGA-packaged product lines and part numbers indicated here currently are not available from Freescale for import or sale in the United States prior to September 2010: Indicated by asterisk (*)

DEVICE(S)

MPN
MC68EC060RC50
MC68EC060RC66
MC68LC060RC50
MC68LC060RC66
SC414265RC50
SC414327FE50E
SC414341RC66
SPAK823CZT25Z3
SPAK823MZT25Z3
SPAK823MZT50Z3
SPAK823ZT25
SPAK823ZT25Z3
SPAK823ZT50
SPAK823ZT50Z3
SPAKXC56303GC00
SPAKXC56303GC100
SPAKXC56303GC66
SPAKXC56303GC80
SPAKXC56303PV100
SPAKXC56303PV66
SPAKXC56303PV80
SSP26003PV66
SSP26007PV100
SSP26011GC66
SSP26202GC66
SSP26202GC66R2
SSP26202GC80
SSP26202GC80R2
SSP26202PV66
SSP26202PV80
SSP26204GC66
SSP26204GC80
SSP26204PV66
SSP26204PV80
*SSP26206GC66
*SSP26206GC66R2
SSP26300PV66
SSP26301PV
SSP26301PV66
SSP26301PV80
SSP26307GC80
XC303B4GC
XC303B4GC100
XC303B4GC66
XC303B4GC80
XC303B4PV
XC303B4PV100
XC303B4PV66
XC303B4PV80
XC56303GC
XC56303GC00
XC56303GC100
*XC56303GC66
*XC56303GC80
XC56303PV
XC56303PV100
XC56303PV66
XC56303PV80
XC56304GC66
XC56304GC80
XC56304PV66
XC56304PV80
XC68060RC50
XC68060RC50C
XC68060RC60
XC68EC060RC50
XC68EC060RC50E
XC68EC060RC60
XC68EC060RC60E
XC68EC060RC66E
XC68EC060RC75E
XC68EC060ZU50E
XC68EC060ZU66E
XC68LC060BRC66E
XC68LC060FE50
XC68LC060RC50
XC68LC060RC50E
XC68LC060RC60E
XC68LC060RC66E
XC68LC060RC75E
XC68LC060ZU50E
XC68LC060ZU66E
XC68S060RC
XPC823CZT25Z3
XPC823MZT25Z3
XPC823MZT50Z3
XPC823MZTZ3
XPC823ZT
XPC823ZT25
XPC823ZT25Z2
XPC823ZT25Z3
XPC823ZT50
XPC823ZT50Z2
XPC823ZT50Z3
XPC823ZTZ2
XPC823ZTZ3
XPC850SEZT25
XPC850SEZT33
XPC850SEZT40
XPC850SEZT50
XPC850ZT25
XPC850ZT33
XPC850ZT40
XPC850ZT50
XPC860DCZP50B
XPC860DEZP50B
XPC860DHZP50B
XPC860ENZP50B
XPC860MHZP50B
XPC860MHZP50BR2
XPC860SRCZP33B
XPC860SRCZP50B
XPC860SRZP25B
XPC860SRZP33B
XPC860SRZP40B
XPC860SRZP50B
XPC860SRZPB
XPC860ZP50B



AFFECTED CHANGE CATEGORIES
  • FAB SITE


  • DESCRIPTION OF CHANGE

    Motorola is pleased to announce improvements to our MOS11 UDR2 0.42um technology by implementing the metallization processes from our more advanced 0.35um technology. These process enhancements take advantage of already qualified technologies and provides increased manufacturability and standardization throughout the fabrication facility. The current UDR2 metallization is comprised of 99% Al, 1% Cu in addition to a Titanium, Titanium-Nitride under layer and Titanium-Nitride anti-reflective coating (top layer). The optimized metallization is 99.5% Al, 0.5% Cu with a Titanium, Titanium-Nitride under layer and Titanium, Titanium-Nitride anti-reflective coating. The advanced metallization improves the formation of the interconnections between metal layers, refered to as vias. This process change notification is also coincident with the anouncement of MC status for the 68EC060 and 68LC060 devices.



    REASON FOR CHANGE

    ANTICIPATED IMPACT OF PRODUCT CHANGE(FORM, FIT, FUNCTION, OR RELIABILITY)

    Freescale will consider specific conditions of acceptance of this change submitted within 30 days of receipt of this notice on a case by case basis. To request further data or inquire about samples, please enter a Service Request.


    QUALIFICATION STATUS:     N/A

    QUALIFICATION PLAN:

    See reliability data summary section



    RELIABILITY DATA SUMMARY:

    This relability data is based on process qualification using 5204QV and additional qualification data provided by the 56306. 5204QV H20D MOS11 0.35 micros DIE DIMENSIONS: 131 x 130 mils LTDY (4.5V/125 degrees C) 168HR 504HR 1008HR 2016HR Lot 1 0/100 0/100 0/100 0/100 Lot 2 0/100 0/100 0/100 0/100 Lot 3 0/94 0/94 0/100 0/94 Lot 4 0/100 0/100 0/100 0/100 Lot 5 0/100 0/100 0/100 0/100 56306 J27A MOS11 0.42 micros DIE DIMENSIONS: 311 x 281 mils LTDY (4.5V/125 degrees C) 168HR 504HR 1008HR Lot 1 0/80 0/80 0/80 Lot 2 0/80 Lot 3 0/79



    ELECTRICAL CHARACTERISTIC SUMMARY:

    Performance is identical





    CHANGED PART IDENTIFICATION:

    68EC060 - Device marking changed from XC to MC. Mask ID changed from 2G59Y to 3G59Y. 68LC060 - Device marking changed from XC to MC. Mask ID changed from 2G59Y to 3G59Y. 68060 - 0E41J changed to 1E41J 860 - 2J24A and 3J24A changed to 9J24A 860SR - 1J24A changed to 6J24A 823 - 5F98S changed to 7F98S 850 - 4F98S changed to 6F98S 821 - 5J24A changed to 8J24A 56306 - 5J27A changed to 7J27A 56303 - 4J22A changed to 5J22A XC390252 - changed from 9J22A to 8J22A





    ATTACHMENT(S):
    N/A