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PRODUCT BULLETIN
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ISSUE DATE:27-Oct-2003
NOTIFICATION:9266
TITLE:TSPG MOS12 CDR3 BPTEOS MATERIAL CHANGE
EFFECTIVE DATE:28-Oct-2003


Because of an order from the United States International Trade Commission, BGA-packaged product lines and part numbers indicated here currently are not available from Freescale for import or sale in the United States prior to September 2010: Indicated by asterisk (*)

DEVICE(S)

MPN
MGT560JMAVVF56
MGT560JMAVVF56R2
MPC533CZP40
MPC534CZP40
MPC535CZP40
MPC536CZP40
MPC561CZP40
MPC561CZP66
MPC561MZP56
MPC561MZP56R2
MPC561MZP66
MPC562CZP40
MPC562CZP66
MPC562MZP56
MPC562MZP56R2
MPC562MZP66
MPC563CZP40
MPC563CZP66
MPC563MZP56
MPC563MZP66
MPC564CZP40
MPC564CZP66
MPC564MZP56
MPC564MZP66
MPC565CZP40
MPC565CZP56
MPC565CZPXX
MPC565MZP56
MPC565MZP56R2
MPC565MZPXX
MPC566AZP56
MPC566CZP40
MPC566CZP56
MPC566MZP56
PC512854MZP56
PCC562R2
PCC564R2
*PGT560JMAVVF56
PPC561MVR56
PPC561MVR56R2
PPC561MZP56
PPC561MZP56R2
PPC561MZP66
PPC562MZP56
PPC562MZP56R2
PPC562MZP66
*PPC563MVN56
PPC563MZP56R2
PPC564MZP56R2
PPC565MZP56
PPC565MZP56R2
SC512856MZP56
SC512856MZP56R2
SC512857MZP56
SC512857MZP56R2
SCC512853R2
SCC512854R2
SCC561R2
SCC562R2
*XGT560JMAVVF56
*XGT560JMAVVF56R2



AFFECTED CHANGE CATEGORIES
  • WAFER PROCESS


  • DESCRIPTION OF CHANGE

    Motorola SPS has changed the process integration of the first interlayer dielectric (ILD) from a BPSG to a BPTEOS film for CDR3 material in MOS12. The end result is that the new film has the same dielectric, absorption, and gettering qualities as the previous film but is significantly more uniform allowing for tighter thickness control. This film is currently in use on other Motorola qualified products.



    REASON FOR CHANGE

    ANTICIPATED IMPACT OF PRODUCT CHANGE(FORM, FIT, FUNCTION, OR RELIABILITY)

    NOTE:
    THE CHANGE(S) SPECIFIED IN THIS NOTIFICATION WILL BE IMPLEMENTED ON THE EFFECTIVE DATE LISTED ABOVE. To request further data or inquire about samples, please enter a Service Request


    QUALIFICATION STATUS:     N/A

    QUALIFICATION PLAN:

    No qual plan was included in the BPTEOS PB.



    RELIABILITY DATA SUMMARY:

    Here is the BPTEOS data: ------------------------ MPC565 (MOS12 Mask set: K13Y) HTOL High Temp Op Life (TA= 125C for 168, 504 hr 1000 W/E cycles prior to stress) Tested end points at Room: Lot A T897351 = 0/77 at 504hr Lot B T883191 = 0/77 at 504hr Lot C T892651 = 0/77 at 504hr ET E2PROM Data Endurance (1000 cycles) and Retention Test (150C). Readpoints at 168 hrs, 504 hrs. Tested end points at Room: Lot A T897351 = 0/77 at 504hr Lot B T883191 = 0/77 at 504hr Lot C T892651 = 0/77 at 504hr THB Temperature Humidity Bias; 85C/85 percent RH Readpoints at 168 hrs, 504hrs. Tested end points at Room: Lot A T897351 = 0/77 at 504hr Lot B T883191 = 0/77 at 504hr Lot C T892651 = 0/77 at 504hr Temp Cycling -65C to 150C. Readpoint at 500 cycles. Tested end points at Room. Lot A T897351 = 0/77 at 500 cycles Lot B T883191 = 0/77 at 500 cycles Lot C T892651 = 0/77 at 500 cycles ED Electrical Distribution (Ppk greater than 1.66) 30 units/lot sampled on 3 lots, passed (6-10 significant parameters tested at Room, Hot and Cold.)



    ELECTRICAL CHARACTERISTIC SUMMARY:

        N/A


    CHANGED PART IDENTIFICATION:

        N/A



    ATTACHMENT(S):
    N/A