|TITLE:||TSPG MOS12 CDR3 BPTEOS MATERIAL CHANGE|
Motorola SPS has changed the process integration of the first interlayer dielectric (ILD) from a BPSG to a BPTEOS film for CDR3 material in MOS12. The end result is that the new film has the same dielectric, absorption, and gettering qualities as the previous film but is significantly more uniform allowing for tighter thickness control. This film is currently in use on other Motorola qualified products.
ANTICIPATED IMPACT OF PRODUCT CHANGE(FORM, FIT, FUNCTION, OR RELIABILITY)
THE CHANGE(S) SPECIFIED IN THIS NOTIFICATION WILL BE IMPLEMENTED ON THE EFFECTIVE DATE LISTED ABOVE. To request further data or inquire about samples, please enter a Service Request
No qual plan was included in the BPTEOS PB.
Here is the BPTEOS data: ------------------------ MPC565 (MOS12 Mask set: K13Y) HTOL High Temp Op Life (TA= 125C for 168, 504 hr 1000 W/E cycles prior to stress) Tested end points at Room: Lot A T897351 = 0/77 at 504hr Lot B T883191 = 0/77 at 504hr Lot C T892651 = 0/77 at 504hr ET E2PROM Data Endurance (1000 cycles) and Retention Test (150C). Readpoints at 168 hrs, 504 hrs. Tested end points at Room: Lot A T897351 = 0/77 at 504hr Lot B T883191 = 0/77 at 504hr Lot C T892651 = 0/77 at 504hr THB Temperature Humidity Bias; 85C/85 percent RH Readpoints at 168 hrs, 504hrs. Tested end points at Room: Lot A T897351 = 0/77 at 504hr Lot B T883191 = 0/77 at 504hr Lot C T892651 = 0/77 at 504hr Temp Cycling -65C to 150C. Readpoint at 500 cycles. Tested end points at Room. Lot A T897351 = 0/77 at 500 cycles Lot B T883191 = 0/77 at 500 cycles Lot C T892651 = 0/77 at 500 cycles ED Electrical Distribution (Ppk greater than 1.66) 30 units/lot sampled on 3 lots, passed (6-10 significant parameters tested at Room, Hot and Cold.)